Recent advances in micro- and nano-machining technologies
نویسندگان
چکیده
منابع مشابه
Micro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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ژورنال
عنوان ژورنال: Frontiers of Mechanical Engineering
سال: 2017
ISSN: 2095-0233,2095-0241
DOI: 10.1007/s11465-017-0410-9